Overview
Axetris AG operates the only MEMS foundry in Central Switzerland, located in Sarnen, Obwalden. Leister entered microsystems in 1998 with the acquisition of startup Lemantech SA and built its own MEMS foundry in 1999; the line was extended to 200mm wafer fabrication in 2005, cleanroom manufacturing passed 1,000 m2 (ISO Class 5-6) in 2011 when the division became Axetris AG, and a ~CHF 10 million 2017 investment doubled production capacity. In-house capabilities include lithography, thin-film deposition, and dry/wet etching, offered as contract wafer processing alongside its own thermopile IR detectors, IR emitters, mass flow controllers, and laser gas detection modules. Key facility details include: The facility is situated at Sarnen, Obwalden, Switzerland. It focuses on MEMS on 150mm, 200mm wafers. Production at this facility commenced in 1999.
Technology
About Axetris AG
Axetris AG is a Swiss micro-technology company based in Sarnen, Obwalden, part of the Leister Group. Operates the only MEMS foundry in Central Switzerland with 1,000+ m2 of cleanroom for 150mm and 200mm wafer processing. Products: MEMS thermopile IR detectors, IR sources, mass flow meters, laser gas detectors, micro-optics. Also offers contract wafer processing services.