Overview
The Micro and Nanofabrication Clean Room of the Institute of Microelectronics of Barcelona (IMB-CNM, CSIC), on the UAB campus in Bellaterra, is Spain's largest R&D cleanroom: 1,500 m2 of class 10 to 10,000 space processing 100mm and 150mm wafers with full CMOS and nanofabrication capability. The institute was founded in 1985 under CSIC, its building completed in 1989, and the cleanroom built in 1991 (initially 900 m2), developing full CMOS technology and silicon devices, sensors, and power semiconductors since. It is a Singular Scientific-Technical Infrastructure (ICTS) in the MICRONANOFABS network. Key facility details include: The facility is situated at Campus UAB, Bellaterra, Barcelona, Spain. It focuses on R&D, Sensors, Analog / Power on 100mm, 150mm wafers. Production at this facility commenced in 1991.