Overview
Fraunhofer IPMS operates a 1,500 sqm ISO Class 4 MOEMS/MEMS cleanroom in Dresden for technology development through pilot production on 200mm wafers, with additional cleanroom capability up to ISO Class 3-6 on 300mm wafers, covering optical sensors, actuators, and photonic/electronic microsystems. The institute was founded in 1992 (as a Dresden branch of the Fraunhofer Institute for Microelectronic Circuits and Systems, independent as IPMS since 2003); its dedicated 200mm MEMS cleanroom at Maria-Reiche-Strasse was inaugurated in 2007 after a two-year construction period. Key facility details include: The facility is situated at Maria-Reiche-Strasse 2, 01109 Dresden, Germany. It focuses on Sensors, Advanced Packaging on 200mm, 300mm wafers. Production at this facility commenced in 2007.
Technology
About Fraunhofer Institute
Fraunhofer-Gesellschaft is Europe's largest applied research organization, with 75 institutes across Germany. Several institutes operate their own semiconductor cleanrooms and pilot production lines: ISIT (Itzehoe, power electronics & MEMS), IISB (Erlangen, SiC/wide-bandgap power electronics), IMS (Duisburg, 8-inch CMOS), and IPMS (Dresden, MOEMS/MEMS photonic microsystems).