Penn State University
Overview
The Penn State MRI Nanofabrication Laboratory is a Class 100/1000 cleanroom in the $225 million, 275,600 sq ft Millennium Science Complex at University Park, PA, which opened to researchers in fall 2011; the Penn State Nanofabrication Facility relocated there from Innovation Park, doubling its fabrication space (~9,500 sq ft of nano-cleanroom). Processes substrates up to 200mm wafers. Capabilities: sputter deposition, atomic layer deposition (ALD), thin-film piezoelectrics, 2D materials, MEMS, dry etch (70+ materials), and lithography. Serves Penn State researchers, other universities, and industry customers worldwide. Key facility details include: The facility is situated at Millennium Science Complex, University Park, PA 16802, USA. It focuses on MEMS on 200mm wafers. Production at this facility commenced in 2011.
Technology
About Penn State University
Pennsylvania State University (Penn State) is a US public research university at University Park, Pennsylvania, founded 1855. The Materials Research Institute (MRI) operates the Penn State Nanofabrication Laboratory, a 15,000 sq ft open-access cleanroom supporting research across MEMS, piezoelectrics, 2D materials, power electronics, photonics, and biomedical devices for academic, government, and industry users.