University of California, Santa Barbara
Overview
The UCSB Nanofabrication Facility is an open-access shared cleanroom at the University of California, Santa Barbara, with over 12,000 sq ft of Class 100 and Class 1000 clean floor space in a bay-and-chase configuration. It is internationally recognized for III-nitride (GaN, InGaN, AlGaN) research, building on UCSB's legacy as the home of Nobel laureate Shuji Nakamura and high-brightness blue LED technology. Capabilities: MOCVD and MBE epitaxy, e-beam and photolithography, dry/wet etch, metal deposition, and characterization. Serves UCSB faculty and students, national labs, and industry partners in compound semiconductor photonics, power electronics, and quantum computing. Key facility details include: The facility is situated at University of California, Santa Barbara, CA 93106, USA. It focuses on Compound Semiconductor, MEMS on 50mm, 75mm, 100mm, 150mm wafers.
Technology
About University of California, Santa Barbara
The University of California, Santa Barbara (UCSB) is a US public research university. The UCSB Nanofabrication Facility in Henley Hall is internationally recognized for III-nitride (GaN, InGaN, AlGaN) semiconductor research, home to Nobel laureate Shuji Nakamura's foundational blue LED work. Open-access cleanroom with MOCVD, MBE, e-beam lithography, and compound semiconductor process tools.