Overview
SITRI (Shanghai Industrial uTechnology Research Institute) operates China's first 8-inch (200mm) 'More than Moore' R&D pilot fabrication line at 235 Chengbei Road, Jiading District, Shanghai. The institute was founded in 2013 with backing from the Shanghai IoT Fund and SIMIT; the pilot fab shell was completed in summer 2015 and SITRI announced the launch of the pilot line in September 2017. The line spans more than 5,000 square meters of cleanroom with over 100 installed tools for MEMS, RF-SOI, piezo and magnetic materials, III-V-on-silicon and related More-than-Moore processes, serving process development and pilot production rather than high-volume manufacturing, with transfers to volume foundries such as SMIC and Hua Hong Grace. Key facility details include: The facility is situated at No. 235 Chengbei Road, Jiading District, Shanghai, China. It focuses on MEMS, Analog / Power on 200mm wafers. Production at this facility commenced in 2017.
Technology
About SITRI
Shanghai Industrial ΞΌTechnology Research Institute (SITRI) is a Chinese open-access innovation platform established in 2013 in Jiading District, Shanghai. Operates China's first 8-inch 'More than Moore' R&D pilot line covering MEMS, silicon photonics, biochips, and RF-SOI. Provides foundry services, engineering support, and investment for 'More than Moore' ecosystem companies.