Overview
SITRI (Shanghai Industrial uTechnology Research Institute) operates China's first 8-inch (200mm) 'More than Moore' R&D pilot fabrication line at 235 Chengbei Road, Jiading District, Shanghai. The institute was co-founded in 2013 by the Shanghai Municipal Science and Technology Commission, the Jiading District Government, and Xinwei Group. The CMOS-compatible line covers MEMS, silicon photonics, biochips, RF-SOI, and advanced packaging (TSV, bonding, thin-film). Key facility details include: The facility is situated at No. 235 Chengbei Road, Jiading District, Shanghai, China. It focuses on MEMS, Analog / Power on 200mm wafers. Production at this facility commenced in 2013.
Technology
About SITRI
Shanghai Industrial ΞΌTechnology Research Institute (SITRI) is a Chinese open-access innovation platform established in 2013 in Jiading District, Shanghai. Operates China's first 8-inch 'More than Moore' R&D pilot line covering MEMS, silicon photonics, biochips, and RF-SOI. Provides foundry services, engineering support, and investment for 'More than Moore' ecosystem companies.