University of Illinois at Urbana-Champaign
Overview
The Holonyak Micro & Nanotechnology Lab (HMNTL) at the University of Illinois Urbana-Champaign is one of the largest and most sophisticated university micro/nanofabrication facilities in the US. Features 15 Class 100/1000 cleanrooms, 46 general-purpose labs, and 2,500 sq ft biosafety Level-2 bionanotechnology complex. Specializes in III-V and III-N lasers, LEDs, transistors, and detectors, with capabilities extending to LiNbO3, Ga2O3, 2D materials, diamond, and AlN. 2021 Elionix ELS-G150 e-beam lithography system patterns 4nm features on wafers up to 200mm. Key facility details include: The facility is situated at 208 N. Wright St., Urbana, IL 61801, USA. It focuses on Compound Semiconductor, MEMS on 200mm wafers. Production at this facility commenced in 1997.
Technology
About University of Illinois at Urbana-Champaign
The University of Illinois Urbana-Champaign (UIUC) is a US public research university founded 1867. The Holonyak Micro & Nanotechnology Lab (HMNTL) is one of the largest university micro/nano fabrication facilities in the US, with 15 cleanrooms and specialization in III-V and III-N compound semiconductors, ultrawide bandgap materials (Ga2O3, AlN, diamond), LiNbO3, 2D materials, and advanced e-beam lithography (Elionix ELS-G150, 4nm resolution, 200mm capable).