University of Illinois at Urbana-Champaign Fabs

The University of Illinois Urbana-Champaign (UIUC) is a US public research university founded 1867. The Holonyak Micro & Nanotechnology Lab (HMNTL) is one of the largest university micro/nano fabrication facilities in the US, with 15 cleanrooms and specialization in III-V and III-N compound semiconductors, ultrawide bandgap materials (Ga2O3, AlN, diamond), LiNbO3, 2D materials, and advanced e-beam lithography (Elionix ELS-G150, 4nm resolution, 200mm capable).