Overview
The Institute of Industrial Science (IIS), University of Tokyo, maintains a 600m² cleanroom chip fabrication facility at the Komaba Research Campus, Meguro-ku, Tokyo. Supports MEMS, semiconductor device research, silicon photonics, and integrated circuit fabrication. Home to LIMMS (IRL2820), a Franco-Japanese CNRS/IIS joint laboratory for MEMS and NEMS. Used by PhD students, faculty, and visiting researchers for prototype and R&D wafer fabrication. Key facility details include: The facility is situated at 4-6-1 Komaba, Meguro-ku, Tokyo 153-8505, Japan. It focuses on MEMS. Production at this facility commenced in 2001.
Technology
About University of Tokyo
The University of Tokyo (Todai) is Japan's leading national research university, founded 1877. The Institute of Industrial Science (IIS) at the Komaba Research Campus, Meguro-ku, Tokyo maintains a 600m² cleanroom for semiconductor, MEMS, and silicon photonics research, and hosts LIMMS (IRL2820), a Franco-Japanese CNRS/IIS joint laboratory for MEMS and NEMS research.