Operating in
Directory
1 Facilities- University of Tokyo IIS Cleanroom FacilityActive
University of Tokyo Fabs
The University of Tokyo (Todai) is Japan's leading national research university, founded 1877. The Institute of Industrial Science (IIS) at the Komaba Research Campus, Meguro-ku, Tokyo maintains a 600m² cleanroom for semiconductor, MEMS, and silicon photonics research, and hosts LIMMS (IRL2820), a Franco-Japanese CNRS/IIS joint laboratory for MEMS and NEMS research.
1
Facilities
N/A
Investment
N/A
Wafers / Mo