Overview
NanoLab@TU/e is an 800 m2 cleanroom at Eindhoven University of Technology that opened in 2002 as TU/e's contribution to the NRC Photonics program. It focuses on integrated photonics, III-V materials, and complex nanostructures, and houses an ASML wafer scanner capable of 100 nm features on 3-inch indium phosphide wafers. Key facility details include: The facility is situated at TU Eindhoven, Eindhoven, Netherlands. It focuses on Automotive / Specialty, Photonics / Optical, Compound Semiconductor on 150mm, 75mm wafers. Production at this facility commenced in 2002.
NanoLabNL
The Dutch national facility for nanotechnology research.
Facility Phases
About NanoLabNL
NanoLabNL is the Dutch national facility for nanotechnology research, offering open-access cleanroom infrastructure across major technical universities for academia and industry.