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Investment
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Wafers / Month
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Production Start
300mm
Wafer Size
Overview
The Super Clean Room (SCR) at AIST Tsukuba is a 3,000 sqm Class 3 cleanroom dedicated to advanced 300mm semiconductor R&D, including 2nm generation and 3DIC research. Key facility details include: The facility is situated at Tsukuba, Ibaraki, Japan. It focuses on Automotive / Specialty, Logic / Foundry and 2 process nodes on 300mm wafers.
Facility Complex
AIST Tsukuba Campus
National Institute of Advanced Industrial Science and Technology (AIST) facilities.
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Total Investment
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Total WPM Capacity
Facility Phases
Technology
Data Quality: 57%