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Investment
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Wafers / Month
2010
Production Start
200mm
Wafer Size
Overview
The TIA-MEMS line at AIST Tsukuba provides research, prototyping, and pilot mass production of MEMS devices on 8-inch (and partially 12-inch) wafers. Under a national project, pilot mass production in collaboration with universities and industry began in FY2010, and the MicroNano Open Innovation Center consortium was founded in FY2011 to open the line to private businesses. Key facility details include: The facility is situated at Tsukuba, Ibaraki, Japan. It focuses on Automotive / Specialty, MEMS on 200mm wafers. Production at this facility commenced in 2010.
Facility Complex
AIST Tsukuba Campus
National Institute of Advanced Industrial Science and Technology (AIST) facilities.
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Total Investment
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Total WPM Capacity
Facility Phases
Technology
Sources
Data Quality: 57%